|
Buffered Oxide Etchant (BOE)  more
products
(electronic grade) Product # GEN-10
| Synonyms: Aqueous NH4-HF Etchant Solutions |
| |
| BOE are available in the following common mix ratios: |
| Ratio |
Assay(as NH4F) |
Assay(as HF) |
| 5:1 |
32.0-34.0 |
8.2-8.5 |
| 6:1 |
33.5-35.5 |
7.0-7.3 |
| 7:1 |
34.3-35.3 |
6.18-6.48 |
| 10:1 |
35.5-37.5 |
4.4-4.7 |
| 20:1 |
37.5-38.5 |
2.32-2.52 |
| 30:1 |
37.7-39.7 |
1.5-1.8 |
| 50:1 |
38.7-39.7 |
1.00-1.10 |
| Specifications |
Item |
Unit |
MIN | MAX |
| |
Color |
Hazen |
|
10 |
| |
Chloride(Cl) |
ppb |
|
0.1 |
| |
Nitrate(NO3) |
ppb |
|
0.1 |
| |
Phosphate(PO4) |
ppb |
|
0.1 |
| |
Sulfate(SO4) |
ppb |
|
0.1 |
| |
Li (lithium)
|
ppb |
|
10 |
| |
Na (Sodium) |
ppb |
|
10 |
| |
Mg (Magnesium) |
ppb |
|
10 |
| |
Al (Aluminum) |
ppb |
|
10 |
| |
K (Potassium) |
ppb |
|
10 |
| |
Ca (Calcium) |
ppb |
|
10 |
| |
Cr (Chromium) |
ppb |
|
10 |
| |
Mn (Manganese) |
ppb |
|
10 |
| |
Fe (Iron) |
ppb |
|
10 |
| |
Ni (Nickel) |
ppb |
|
10 |
| |
Co (Cobalt) |
ppb |
|
10 |
| |
Cu (Copper) |
ppb |
|
10 |
| |
Zn (Zinc) |
ppb |
|
10 |
| |
Mo (Molybdenum) |
ppb |
|
10 |
| |
Cd (Cadmium) |
ppb |
|
10 |
| |
Pb (Lead) |
ppb |
|
10 |
| |
Ag (Silver) |
ppb |
|
10 |
| |
Particle >=0.3um |
Ea/ml |
|
350 |
| |
Particle >= 0.5um |
Ea/ml |
|
150 |
| Physical Properties* |
Description |
Colorless solution |
| |
Specific Gravity @ 20 °C |
1.100 |
| |
|
|
| Shipping Information | Containers |
| |
20L clean drum |
| | Other
containers available upon request. | | | Shipping
Classification | | | Proper
shipping name:
CORROSIVE LIQUID, TOXIC, N.O.S. (CONTAINS HYDROFLUORIC ACID, AMMONIUM FLUORIDE)
|
| |
Hazard classification:
8, 6.1 |
| |
Identification number:
UN2922
|
| |
Packing Group:
II |
| Safety and Handling |
For specific safety and handling information please refer to the |
| | Material Safety
Data Sheet which is available upon request. |
| Chemical Registration
Numbers |
CAS: N/A to mixtures |
| |
EINECS : N/A to mixtures |
| |
NIOSH/RTECS : N/A to mixtures |
| |
HS CODE :
2826 1900 |
|
