Electronic Grade Tetramethylammonium
Hydroxide, 20.0% 
( Developer TMAH ) Product # GEC-20
| Description | The
solution is colorless transparent liquid. | | | Structural
Formula: (CH3)4NOH | | | Formula
Weight: 91.15 |
| Specifications |
Item |
Unit |
MIN |
MAX |
| |
Assay |
% |
19.90 |
20.10 |
| |
Color |
Hazen |
|
5 |
| |
CO32- (Carbonate) |
ppm |
|
100 |
| |
Cl- (Chloride ) |
ppm |
|
0.1 |
| |
CH3OH (Methanol) |
ppm |
|
40 |
| |
Li (Lithium) |
ppb |
|
5 |
| |
Na (Sodium) |
ppb |
|
10 |
| |
Mg (Magnesium) |
ppb |
|
5 |
| |
Al (Aluminium) |
ppb |
|
10 |
| |
K (Potassium) |
ppb |
|
10 |
| |
Ca (Calcium) |
ppb |
|
10 |
| |
Cr (Chromium) |
ppb |
|
5 |
| |
Mn (Manganese) |
ppb |
|
5 |
| |
Fe (Iron) |
ppb |
|
5 |
| |
Ni (Nickel) |
ppb |
|
5 |
| |
Co (Cobalt) |
ppb |
|
5 |
| |
Cu (Copper) |
ppb |
|
5 |
| |
Zn (Zinc) |
ppb |
|
5 |
| |
Mo (Molybdenum) |
ppb |
|
5 |
| |
Cd (Cadmium) |
ppb |
|
5 |
| |
Pb (Lead) |
ppb |
|
5 |
| |
Ag (Silver) |
ppb |
|
5 |
| |
Particle >=0.5um |
Ea/ml |
|
100 |
| Physical Properties* | Form
| Liquid | | | Boiling
Point,°C | 100.0 |
| | Freezing point,
°C | <-25.0 |
| | Viscosity@ 25 °C,cst
| 2.8 | | | Specific
Gravity @ 60 °F | 1.022 |
| | Flashpoint (Pensky
Martens), °F | >200 |
| | pH | >13 |
*Results based on actual analysis of product; numbers may vary slightly
from lot to lot..
| Usage | widely
used in electronic industry , especially as silicon wafer wet etchant positive
resister developer and super clean solution for CMP process. |
| Shipping Information | Containers |
| |
200L clean drum |
| | Other
containers available upon request. | | | Shipping
Classification | | | Proper
shipping name: tetramethylammonium hydroxide |
| | Hazard classification:
8 | | | Identification
number: UN1835, PG11 |
| Safety and Handling |
For specific safety and handling information please refer to the |
| | Material Safety
Data Sheet which is available upon request. |
| Chemical Registration
Numbers | CAS 75-59-2 |
| | EINECS 200-882-9 |
| | NIOSH/RTECS
PA0875000 |
| Remarks* |
Tetramethylammonium
Hydroxide(25.0%,2.380%electronic grade), TMAH (25%, 98%,industrial grade) are
also available, please contact us for details. |
|
